Helium Wafer Cooling
Helium Wafer Cooling
| Image | Model | Description |
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PPCA Pressure Controller |
The PPCA pressure controller provides pressure measurement and control for critical process applications such as backside wafer pressure control, transport chamber pressure control and process gas panel pressure balancing. The device may be configured for either upstream (inlet) or downstream (outlet) pressure control. This is accomplished in a compact package that saves critical space when compared to the previous multi-component systems necessary to accomplish the task. |
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PPCMA Pressure Controller with Mass Flow Meter |
The PPCMA pressure controller with integrated mass flow meter provides pressure measurement and control while monitoring mass flow rates for critical process applications (e.g. backside wafer cooling) in a compact package that saves critical space when compared to the previous multi-component systems needed to accomplish the task. |
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640A/640B Absolute Pressure Controller for Closed-Loop Electronic Pressure Control |
The 640B Absolute Pressure Controller is a self-contained compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics. |
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649A/649B Compact Pressure Controller with Integral Baratron®Capacitance Manometer and Mass Flow Meter |
The 649B Pressure Controller is a single instrument that provides both pressure control and flow metering, replacing multiple component subassemblies. The 649B Pressure Controller compact design allows for significant reduction in BWCS (backside wafer cooling systems) size and complexity. |
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Dual-Zone Pressure Controller (DPC) |
The Dual-Zone Pressure Controller (DPC) is a highly integrated closed-loop pressure control subsystem. It consists of an inlet pneumatic shut-off valve, two independent channels of pressure control with mass flow metering, and a vacuum outlet. Each pressure control channel of the DPC Dual-Zone Pressure Controller consists of a pressure sensor, a control valve, and a mass flow meter, similar to the 649 Pressure Controller with Integral Mass Flow Meter. |
