Integrated Upstream Pressure Valves & Controllers
Integrated Upstream Pressure Valves & Controllers
| Image | Model | Description |
 |
PPCA Pressure Controller | The PPCA pressure controller provides pressure measurement and control for critical process applications such as backside wafer pressure control, transport chamber pressure control and process gas panel pressure balancing. The device may be configured for either upstream (inlet) or downstream (outlet) pressure control. This is accomplished in a compact package that saves critical space when compared to the previous multi-component systems necessary to accomplish the task. |
 |
GPCA General Purpose Pressure Controller | The GPCA is a metal-sealed pressure controller well suited for a wide variety of applications requiring pressure control capability from 500 Torr to 100 psi. It incorporates the latest in digital flow control electronics along with a well proven, thermally stable pressure sensor and mechanical design. |
 |
640B Absolute Pressure Controller for Closed-Loop Electronic Pressure Control | The 640B Absolute Pressure Controller is a self-contained compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics. |
 |
PPCMA Pressure Controller with Mass Flow Meter | The PPCMA pressure controller with integrated mass flow meter provides pressure measurement and control while monitoring mass flow rates for critical process applications (e.g. backside wafer cooling) in a compact package that saves critical space when compared to the previous multi-component systems needed to accomplish the task. |
 |
GPCMA General Purpose Pressure Controller with Mass Flow Meter | The GPCMA is a metal-sealed pressure controller with an integral mass flow meter. It is suited for a wide variety of applications requiring pressure control capability from 500 Torr to 100 psi. The GPCMA incorporates the latest in digital flow control electronics along with a well proven, thermally stable pressure sensor and mechanical design. The mass flow meter provides the capability of monitoring mass flow rates as a diagnostic for critical process applications. |
 |
641B Gage Pressure Controller for Closed-Loop Electronic Pressure Control | The 641B Gage Pressure Controller is a self-contained, compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics. |
 |
piPC PC90 Integrated Pressure Controller | The πPC is a critical process control instrument in the MKS line of digital control, web-enabled products, providing the latest in pressure measurement and control technology necessary to meet the process demands of the semiconductor and other leading edge process industries. |
 |
piPC PC99 Integrated Pressure Controller with Mass Flow Meter | The πPC with Integral MFM (PC99) provides pressure measurement and control while monitoring mass flow rates for critical process applications such as process gas panel pressure balancing. This is accomplished in a compact package that saves critical space when compared to the previous multicomponent systems necessary to accomplish the task. |
 |
Dual-Zone Pressure Controller (DPC) | The Dual-Zone Pressure Controller (DPC) is a highly integrated closed-loop pressure control subsystem. It consists of an inlet pneumatic shut-off valve, two independent channels of pressure control with mass flow metering, and a vacuum outlet. Each pressure control channel of the DPC Dual-Zone Pressure Controller consists of a pressure sensor, a control valve, and a mass flow meter, similar to the 649 Pressure Controller with Integral Mass Flow Meter. |
 |
649B Compact Pressure Controller with Integral Baratron® Capacitance Manometer & Mass Flow Meter | The 649B Pressure Controller is a single instrument that provides both pressure control and flow metering, replacing multiple component subassemblies. The 649B Pressure Controller compact design allows for significant reduction in BWCS (backside wafer cooling systems) size and complexity. |
