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Model |
Description |
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148J All-metal Control Valve |
The advanced ultraclean design of the MKS Instruments 148J All Metal Control Valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He) are used in order to avoid contamination and corrosion. The 148 high temperature valve can operate to process temperatures of 150°C. |
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154B High Flow Control Valve |
The MKS Instruments 154 High Flow Control Valve offers better response time as compared to other high flow control valves. This is possible through the use of a "balanced forces" design that automatically neutralizes the pressure-induced imbalances within the valve. The elastomer-sealed 154 valve is designed for flow rates from 0.2 to 200 slm. |
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248D Flow Control Valve |
The MKS Instruments 248 flow control valve is an elastomer-sealed, general purpose valve for applications from 0.1 sccm to 20 slm. |
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245 Metal-seated Control Valve |
The 245 Valve is a modified version of the Granville-Phillips Series 216 all-metal, bakeable control valve. The 245 Valve is capable of controlling pressure from 10-11 to 6000 Torr, with a maximum throughput up to 2500 Torr-liters/sec (200 slm): The valve can be used with many corrosive gases that preclude the use of other valves. With the valve driver assembly removed, the valve may be baked to 450°C for UHV applications. The stepper motor used to drive the Type 245 allows response to pressure or set point changes in fractions of a second, and will drive the valve from a fully closed to a fully open position in only 15 seconds. The Type 244 Controller completes the system. |
