Upstream Valve Controllers
Upstream Valve Controllers
| Image | Model | Description |
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651C Digital/Analog Pressure Controller | The MKS 651 Self-tuning/Digital PID Valve Controller drives MKS 653 or 253 Exhaust Throttle Valves with speed and precision. Its self-tuning algorithm brings the system to set point faster than conventional controllers, and ensures repeatable process recipes without operator involvement. The self-tuning function determines optimal control parameters for any set point in the range of the valve by learning time constants, transfer functions of the valve and plumbing, valve gain, and other important parameters. |
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1651C Displayless Digital Pressure Controller | The MKS Instruments 1651 is a self-tuning, displayless pressure controller which operates from user-supplied ±15 VDC input power. Its compact size allows for installation anywhere on the process system, saving valuable rack space. The 1651 can be commanded through RS-232 communications, or it will accept an analog set point for pressure or position control. Alternately, there are five preprogrammable pressure or position set points which can be selected via TTL signals. It is fully compatible with the electrical signals, connectors, and software of the MKS 651 Controller. The self-tuning algorithm determines optimal control parameters for any set point in the range of the valve by learning time constants, transfer functions of the valve and plumbing, valve gain, and other important parameters. |
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244E Pressure/Flow Controller | The MKS Instruments 244E Pressure/Flow Controller is designed to interface with a wide variety of input signals and with external control signals for full system automation. Set point, phase lead and gain, manual/automatic/external control mode, and input signal adjustments are provided. The 244 accepts input signals from thermocouple and ionization gauges, Pirani gauges, and MKS Baratron® capacitance manometers with Full Scales between 0.1 and 10 VDC. A 245 Control Valve is needed for the System. |
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1249A Solenoid Control Valve Driver | The 1249 Control Valve Driver provides the drive signal required to operate the MKS 148 and 248 Proportioning Solenoid Valves used for pressure or flow control. It is intended for use with PCs, PLCs, or other controllers that provide the necessary PID control functions, but which do not have the current output necessary to drive these valves. (Open-loop control of these valves, i.e. no PID control, is not recommended.) |
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250E Gas Inlet Pressure/Flow Control Module | With the 250E Gas Inlet Pressure/Flow Control Module, input can be supplied by a Baratron® for closed-loop pressure control, or flow input can be measured by a mass flow meter for closed-loop flow control. |
