Thermal & Pressure-based Mass Flow Controllers & Meters
Thermal & Pressure-based Mass Flow Controllers & Meters
| Image | Model | Description |
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G-Series Thermal Mass Flow Controllers & Meters with Fast & Repeatable Performance | G-Series Mass Flow Controllers are a cost effective, high-performance family of mass flow controllers well suited for most industries and applications. |
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I-Series IP66-rated Thermal Mass Flow Controllers & Meters | I-Series Mass Flow Controllers are designed specifically for mass flow controller applications in harsh environments to protect against water and dust. The IP66-rated enclosure for I-Series Mass Flow Controllers protect it from direct water spray (for example, hose-down in bioreactor applications) as well as dust. |
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P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers | P-Series, high performance mass flow controllers are designed for the most critical process applications where accuracy, repeatability as well as pressure insensitivity are requirements. |
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High-flow Thermal Mass Flow Controllers & Meters | MKS offers both elastomer and metal sealed mass flow controllers for flow rates up to 300 slm. Versions are available for standard and harsh environments where protection from water and dust is required. |
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Compact, General Purpose Thermal Mass Flow Controllers | The MF1's compact size (less than 4 inches high, 3 inches long, 1 inches wide) provides an option where available space is limited such as in many analytical and sputter applications. While small in stature, the elastomer-sealed MF1 offers excellent accuracy and repeatability. |
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Thermal & Pressure-based Mass Flow Controllers for Special Applications | Certain process vapors and gases require mass flow controllers of a special design specific to the material as well as process conditions. MKS offers both thermal mass flow controllers and pressure based mass flow controllers for these applications that require flow control at elevated temperatures and/or low pressure drop conditions given the source material charactertics. |
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Legacy Mass Flow Controllers & Meters | While MKS continues to enhance its Mass Flow Control product line with new models such as those above, there are many more mass flow controller models MKS has provided over the years. MKS continues to offer and provide support for its loyal customer base for these MFCs. |
