High-flow Thermal Mass Flow Controllers & Meters

High-flow Thermal Mass Flow Controllers & Meters

MKS offers both elastomer and metal sealed mass flow controllers for flow rates up to 300 slm. Versions are available for standard and harsh environments where protection from water and dust is required.

Common Features:

• Elastomer & metal sealed MFC/MFM
• MFC Flow rates up from 50 to 300 slm
• Multi-range/multi-gas MFC; 1% of setpoint accuracy
• Digital and analog I/O